Active layers of high-performance lead zirconate titanate at temperatures compatible with silicon nano- and microelecronic devices
authors Bretos, I; Jimenez, R; Tomczyk, M; Rodriguez-Castellon, E; Vilarinho, PM; Calzada, ML
nationality International
journal SCIENTIFIC REPORTS
keywords SOL-GEL METHOD; FIELD-EFFECT TRANSISTORS; PBTIO3 THIN-FILMS; FERROELECTRIC OXIDES; FLEXIBLE ELECTRONICS; EXCIMER-LASER; CRYSTALLIZATION; PRECURSORS; TECHNOLOGY; DEPOSITION
abstract Applications of ferroelectric materials in modern microelectronics will be greatly encouraged if the thermal incompatibility between inorganic ferroelectrics and semiconductor devices is overcome. Here, solution-processable layers of the most commercial ferroelectric compound - morphotrophic phase boundary lead zirconate titanate, namely Pb(Zr0.52Ti0.48)O-3 (PZT) - are grown on silicon substrates at temperatures well below the standard CMOS process of semiconductor technology. The method, potentially transferable to a broader range of Zr:Ti ratios, is based on the addition of crystalline nanoseeds to photosensitive solutions of PZT resulting in perovskite crystallization from only 350 degrees C after the enhanced decomposition of metal precursors in the films by UV irradiation. A remanent polarization of 10.0 mu C cm(-2) is obtained for these films that is in the order of the switching charge densities demanded for FeRAM devices. Also, a dielectric constant of similar to 90 is measured at zero voltage which exceeds that of current single-oxide candidates for capacitance applications. The multifunctionality of the films is additionally demonstrated by their pyroelectric and piezoelectric performance. The potential integration of PZT layers at such low fabrication temperatures may redefine the concept design of classical microelectronic devices, besides allowing inorganic ferroelectrics to enter the scene of the emerging large-area, flexible electronics.
publisher NATURE PUBLISHING GROUP
issn 2045-2322
year published 2016
volume 6
digital object identifier (doi) 10.1038/srep20143
web of science category Multidisciplinary Sciences
subject category Science & Technology - Other Topics
unique article identifier WOS:000369321100001
  ciceco authors
  impact metrics
times cited (wos core): 2
journal impact factor (jcr 2016): 4.259
5 year journal impact factor (jcr 2016): 4.847
category normalized journal impact factor percentile (jcr 2016): 85.156
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