Tin Dioxide Sensing Layer Grown on Tubular Nanostructures by a Non-Aqueous Atomic Layer Deposition Process
authors Marichy, C; Donato, N; Willinger, MG; Latino, M; Karpinsky, D; Yu, SH; Neri, G; Pinna, N
nationality International
journal ADVANCED FUNCTIONAL MATERIALS
keywords SNO2 THIN-FILMS; CARBON NANOTUBES; ROOM-TEMPERATURE; GAS SENSOR; AIR-POLLUTION; OXIDE; CO; EPITAXY; NANOSENSORS; SENSITIVITY
abstract A new atomic layer deposition (ALD) process for nanocrystalline tin dioxide films is developed and applied for the coating of nanostructured materials. This approach, which is adapted from non-hydrolytic sol-gel chemistry, permits the deposition of SnO(2) at temperatures as low as 75 degrees C. It allows the coating of the inner and outer surface of multiwalled carbon nanotubes with a highly conformal film of controllable thickness. The ALD-coated tubes are investigated as active components in gas-sensor devices. Due to the formation of a p-n heterojunction between the highly conductive support and the SnO(2) thin film an enhancement of the gas sensing response is observed.
publisher WILEY-V C H VERLAG GMBH
issn 1616-301X
year published 2011
volume 21
issue 4
beginning page 658
ending page 666
digital object identifier (doi) 10.1002/adfm.201001572
web of science category Chemistry, Multidisciplinary; Chemistry, Physical; Nanoscience & Nanotechnology; Materials Science, Multidisciplinary; Physics, Applied; Physics, Condensed Matter
subject category Chemistry; Science & Technology - Other Topics; Materials Science; Physics
unique article identifier WOS:000287667800006
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journal impact factor 13.325
5 year journal impact factor 13.274
category normalized journal impact factor percentile 94.154
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