Role of high microwave power on growth and microstructure of thick nanocrystalline diamond films: A comparison with large grain polycrystalline diamond films
authors Tang, CJ; Fernandes, AJS; Girao, AV; Pereira, S; Shi, FN; Soares, MR; Costa, F; Neves, AJ; Pinto, JL
nationality International
journal JOURNAL OF CRYSTAL GROWTH
author keywords Characterization; Microwave plasma assisted chemical vapour deposition process; Diamond; Nanomaterials
keywords CHEMICAL-VAPOR-DEPOSITION; MATERIALS SCIENCE; CVD DIAMOND; NITROGEN; FABRICATION; MORPHOLOGY; TEXTURE; MEMS; MECHANISMS; NUCLEATION
abstract In this work, we study the growth habit of nanocrystalline diamond (NCD) films by exploring the very high power regime, up to 4 kW, in a 5 kW microwave plasma chemical vapour deposition (NiPCVD) reactor, through addition of a small amount of nitrogen and oxygen (0.24%) into 4% CH4, in H-2 plasma. The coupled effect of high microwave power and substrate temperature on NCD growth behaviour is systematically investigated by varying only power, while fixing the remaining operating parameters. When the power increases from 2 kW to 4 kW, resulting also in rise of the Si substrate temperature higher than 150 degrees C, the diamond films obtained maintain the NCD habit, while the growth rate increases significantly. The highest growth rate of 4.6 mu m/h is achieved for the film grown at 4 kW, which represents a growth rate enhancement of about 15 times compared with that obtained when using 2 kW power. Possible factors responsible for such remarkable growth rate enhancement of the NCD films are discussed. The evolution of NCD growth characteristics such as morphology, microstructure and texture is studied by growing thick films and comparing it with that of large grain polycrystalline (PCD) films. One important characteristic of the NCD films obtained, in contrast to PCD films, is that irrespective of deposition time (i.e film thickness), their grain size and surface roughness remain in the nanometer range throughout the growth. Finally, based on our present and previous experimental results, a potential parameter window is established for fast growth of NCD films under high power conditions. (C)) 2013 Elsevier B.V. All rights reserved
publisher ELSEVIER SCIENCE BV
issn 0022-0248
year published 2014
volume 389
beginning page 83
ending page 91
digital object identifier (doi) 10.1016/j.jcrysgro.2013.11.091
web of science category Crystallography; Materials Science, Multidisciplinary; Physics, Applied
subject category Crystallography; Materials Science; Physics
unique article identifier WOS:000335768600014
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