3D multiscale controlled micropatterning of lead-free piezoelectric electroceramics via Epoxy Gel Casting and lift-off
authors Kaushal, A; Olhero, SM; Singh, B; Bhardwaj, C; Sharma, I; Bdikin, I; Button, T; Ferreira, JMF
nationality International
journal JOURNAL OF THE EUROPEAN CERAMIC SOCIETY
author keywords BZT-BCT electroceramics; Micropatterning; Aqueous suspension
keywords CERAMIC MICROCOMPONENTS; LITHOGRAPHY
abstract We report on the fabrication of multiscale three-dimensional (3D) micropatterning of Ba-0.5(Zr0.2Ti0.8)O-3 - (0.5)(Ba0.7Ca0.3)TiO3 (BZT- BCT) electroceramic material using soft lithographic PDMS moulds. The ceramic microcomponents were successfully consolidated by Epoxy Gel Casting from stable aqueous suspension of BZT-BCT material. A successful aqueous processing of electroceramic material was employed with surface protection of powder particles against hydrolysis as considerably an important parameter to achieve high solid loading suspension with pseudoplastic behaviour suitable for casting in micro scale moulds. The process to obtain micro sized pattern of material was divided in two steps: (i) production of high quality SU-8 master moulds and the respective negative replicas in PDMS (soft mould) by photolithography and soft mould replication, respectively; (ii) casting the soft moulds by stable high solid loading BZT-BCT suspensions in presence of gelation agents followed by de -moulding, drying and sintering. The resulting green micropattern structures show interesting features, including complex structures with a periodic variations through their length and, multiscale array of hexagonal shaped pillars of different aspect ratios (AR) (max AR approximate to 8 with approx 320 mu m of height and side length 40 mu m) with smooth side wall features along height. The green pillar arrays were further sintered to show the suitability of aqueous processing of material and proposed casting method. (C) 2017 Elsevier Ltd. All rights reserved.
publisher ELSEVIER SCI LTD
issn 0955-2219
year published 2017
volume 37
issue 9
beginning page 3079
ending page 3087
digital object identifier (doi) 10.1016/j.jeurceramsoc.2017.03.037
web of science category Materials Science, Ceramics
subject category Materials Science
unique article identifier WOS:000401596300009
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