Atomic layer deposition of nanostructured materials
authors Guylhaine Clavel, Catherine Marichy and Nicola Pinna
editors Nicola Pinna, Mato Knez.
chapter title Sol–Gel Chemistry and Atomic Layer Deposition
nationality International
author keywords atomic layer deposition; condensation reaction; nonaqueous sol–gel; metal oxide formation; sol–gel reaction
abstract This chapter contains sections titled: Aqueous and Nonaqueous Sol–Gel in Solution Sol–Gel and ALD: An Overview Mechanistic and In Situ Studies References
publisher Wiley-VCH
isbn 978-3-527-32797-3
year published 2011
book digital object identifier (doi) 10.1002/9783527639915.ch4

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