Specific features of the formation of Ba (x) Sr1-x TiO3 ferroelectric thin films on different substrates by radio-frequency sputtering


Epitaxial thin films of Ba (x) Sr1 - x TiO3 solid solutions on MgO(001) and NdGaO3(011) single-crystal substratesare prepared by radio-frequency cathode sputtering of a ceramic target with stoichiometric composition on a magnetron-sputtering apparatus. The main qualitative differences in optical, structural, and electrical properties of the ferroelectric films prepared are determined, and their substantial dependence on the choice of the substrate is revealed.

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Ivanov, MS; Afanas'ev, MS

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