Interfaces in Nano-/Microcrystalline Multigrade CVD Diamond Coatings
authors Almeida, FA; Salgueiredo, E; Oliveira, FJ; Silva, RF; Baptista, DL; Peripolli, SB; Achete, CA
nationality International
journal ACS APPLIED MATERIALS & INTERFACES
author keywords CVD diamond; multilayer; interface; high resolution transmission electron microscopy
keywords HOT-FILAMENT CVD; FILMS; TEMPERATURE; PERFORMANCE; DEPOSITION; SURFACES; SYSTEMS; GROWTH
abstract The interfaces of multilayered CVD diamond films grown by the hot-filament technique were characterized with high detail using HRTEM, STEM-EDX, and EELS. The results show that at the transition from micro- (MCD) to nanocrystalline diamond (NCD), a thin precursor graphitic film is formed, irrespectively of the NCD gas chemistry used (with or without argon). On the contrary, the transition of the NCD to MCD grade is free of carbon structures other than diamond, the result of a higher substrate temperature and more abundant atomic H in the gas chemistry. At those transitions WC nanoparticles could be found due to contamination from the filament, being also present at the first interface of the MCD layer with the silicon nitride substrate.
publisher AMER CHEMICAL SOC
issn 1944-8244
year published 2013
volume 5
issue 22
beginning page 11725
ending page 11729
digital object identifier (doi) 10.1021/am403401s
web of science category Nanoscience & Nanotechnology; Materials Science, Multidisciplinary
subject category Science & Technology - Other Topics; Materials Science
unique article identifier WOS:000327812300034
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journal analysis (jcr 2019):
journal impact factor 8.758
5 year journal impact factor 8.901
category normalized journal impact factor percentile 86.33
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