Acoustic emission detection of macro-indentation cracking of diamond coated silicon

resumo

A modified macro-indentation technique was employed in order to establish the adhesion strength of chemical vapour deposited diamond coated silicon. For this purpose, a diamond Brale tip indenter was adapted to a universal testing machine coupled to a piezoelectric transducer for recording the acoustic emission (AE) signal of the cracking events. Post scanning electron microscope observations were a complementary tool to infer the cracking mechanisms and to assess the interfacial cracking resistance from crack dimensions. The AE plots showed that the silicon substrate is the source of most of the acoustic peaks detected on the diamond coated materials. Moreover, the acoustic signal increases with load as a result of the lateral and radial cracking arising. Two different diamond film thicknesses were compared to study the effect on adhesion. The thicker 40 mum diamond film exhibited a better adhesion than the 10 mum one based on the absence of delamination and on a higher interfacial cracking resistance (1650 and 350 kN m(-1), respectively). (C) 2003 Elsevier Science B.V. All rights reserved.

palavras-chave

CHEMICAL-VAPOR-DEPOSITION; ADHESION STRENGTH; COATINGS; FILMS; NUCLEATION; MPCVD

categoria

Materials Science

autores

Belmonte, M; Fernandes, AJS; Costa, FM; Oliveira, FJ; Silva, RF

nossos autores

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