Mechanical performance upgrading of CVD diamond using the multilayer strategy
authors Salgueiredo, E; Amaral, M; Almeida, FA; Fernandes, AJS; Oliveira, FJ; Silva, RF
nationality International
journal SURFACE & COATINGS TECHNOLOGY
author keywords CVD diamond; Multilayers; Hot filament, adhesion; Von Mises stress
keywords CHEMICAL-VAPOR-DEPOSITION; SILICON-NITRIDE CERAMICS; ADHESION STRENGTH; CUTTING TOOLS; THIN-FILMS; COATINGS; NANOCRYSTALLINE; NANO; SI3N4; WATER
abstract The present work is a comparative study of different combinations of microcrystalline (MCD) and nanocrystalline diamond (NCD) varieties (monolayers, bi-, tri- and fourfold layers) grown by hot filament CVD technique on silicon nitride ceramic substrates. The Hertzian stress states under static indentation are estimated and compared on the basis of the von Mises stress parameter. The diamond multilayer morphology and the structural quality were evaluated step-by-step by SEM, AFM and UV-Raman spectroscopy. By using the multilayer strategy, starting with a MCD adherent layer on Si3N4 ceramic substrates and finishing with a NCD smooth layer at the top, it was possible to keep the surface roughness at a lower RMS level, of around 90 nm. The fourfold multilayer configuration allowed obtaining 10 mu m thick diamond coatings that endure an indentation load of 800 N with a Brale cone, before film spalling-off. This behaviour is determined by the high bonding strength of the initial MCD layer grown on the Si3N4 ceramic substrate, where the von Mises stress (J(2)(1/2)) is estimated as 27 GPa. (C) 2013 Elsevier B.V. All rights reserved.
publisher ELSEVIER SCIENCE SA
issn 0257-8972
year published 2013
volume 236
beginning page 380
ending page 387
digital object identifier (doi) 10.1016/j.surfcoat.2013.10.017
web of science category Materials Science, Coatings & Films; Physics, Applied
subject category Materials Science; Physics
unique article identifier WOS:000329884300053
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journal analysis (jcr 2019):
journal impact factor 3.784
5 year journal impact factor 3.754
category normalized journal impact factor percentile 83.171
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