Fracture strength and fatigue endurance in Gd-doped ceria thermal actuators
authors Mishuk, E; Ushakov, A; Shklovsky, J; Krylov, S; Shacham-Diamand, Y; Shur, VY; Kholkin, A; Lubomirsky, I
nationality International
journal SENSORS AND ACTUATORS A-PHYSICAL
author keywords MEMS; Actuator; Doped ceria; Fatigue
keywords ELECTROSTRICTION; TOUGHNESS; FILMS; PURE
abstract We studied the stability of the mechanical properties and the fatigue endurance of Gd-doped ceria (CGO), which is a promising electromechanically active material for microelectromechanical systems (MEMS). Specifically, the fracture strength and long-term operation of plate-type circular (2 mm diameter) thermal actuators made of approximate to 1.15 mu m thick Ce0.95Gd0.05O1.975 (CGO5) were investigated. Excitation voltage of 10 V at the frequency range between 1 and 2.1 MHz induces Joule heating effect that can generate an inplane strain of approximate to 0.1 %. The operation temperature ranged from 25 degrees C to 80 degrees C and the temperature shift, caused by the AC heating, was about 80 K at 10 V. Critical fracture was found to occur at out-of-plane displacements between similar to 35 and similar to 42 mu m, which corresponds to the average bending stress of similar to 44 MPa at the center of the plate. During long-term operation, the actuators exhibit gradual decrease in the response, probably due to contact degradation. However, structural damage or mechanical fatigue was not found even after 10(7) cycles at a stress level of similar to 30 % of the critical fracture strength. (C) 2020 Elsevier B.V. All rights reserved.
publisher ELSEVIER SCIENCE SA
issn 0924-4247
year published 2020
volume 304
digital object identifier (doi) 10.1016/j.sna.2020.111885
web of science category Engineering, Electrical & Electronic; Instruments & Instrumentation
subject category Engineering; Instruments & Instrumentation
unique article identifier WOS:000526109600024
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