Interferometric measurements of graphene-based membranes for micromechanical applications
authors Ushakov, AD; Akhmatkhanov, AR; Chichkov, MV; Turutin, AV; Chuvakova, MA; Kravchenko, I; Shur, VY; Kholkin, AL
nationality International
journal FERROELECTRICS
author keywords Piezoelectricity; graphene; membrane; FEM; resonance; interferometry
keywords PIEZOELECTRICITY; ELECTROSTRICTION
abstract Recent studies on piezoelectricity in 2D materials, such as graphene, have revealed their potential in multiple applications including microelectromechanical systems. In this work, we reveal piezoelectricity in few-layer graphene sheets deposited on amorphous Si3N4 membranes. The response in the center of square membrane of 6.7 x 6.7 mm(2) size reaches about 14 nm at resonance and could be further enhanced by adjusting the composite structure. Resonance piezoelectric phenomena are fully consistent with the earlier piezoresponse force microscopy observations on free-standing piezoelectric graphene and open up a possibility of using 2D materials in micromechanical applications.
publisher TAYLOR & FRANCIS LTD
issn 0015-0193
isbn 1563-5112
year published 2020
volume 560
issue 1
beginning page 95
ending page 101
digital object identifier (doi) 10.1080/00150193.2020.1722889
web of science category Materials Science, Multidisciplinary; Physics, Condensed Matter
subject category Materials Science; Physics
unique article identifier WOS:000536970900014
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journal impact factor 0.669
5 year journal impact factor 0.718
category normalized journal impact factor percentile 9.089
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