Interferometric measurements of graphene-based membranes for micromechanical applications


Recent studies on piezoelectricity in 2D materials, such as graphene, have revealed their potential in multiple applications including microelectromechanical systems. In this work, we reveal piezoelectricity in few-layer graphene sheets deposited on amorphous Si3N4 membranes. The response in the center of square membrane of 6.7 x 6.7 mm(2) size reaches about 14 nm at resonance and could be further enhanced by adjusting the composite structure. Resonance piezoelectric phenomena are fully consistent with the earlier piezoresponse force microscopy observations on free-standing piezoelectric graphene and open up a possibility of using 2D materials in micromechanical applications.



subject category

Materials Science; Physics


Ushakov, AD; Akhmatkhanov, AR; Chichkov, MV; Turutin, AV; Chuvakova, MA; Kravchenko, I; Shur, VY; Kholkin, AL

our authors


The work was supported by the Russian Foundation for Basic Research (grant 16-29-14050-ofrm) and Government of the Russian Federation (Act 211, Agreement 02.A03.21.0006). The equipment of the Ural Center for Shared Use Modern Nanotechnology Ural Federal University was used. A portion of this research was conducted at the Center for Nanophase Materials Sciences, which is a DOE Office of Science User Facility. A.V.T. was supported by the Russian Science Foundation, project no. 19-79-30062 in part of graphene samples preparation.

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