Piezoelectric PZT Thin Films on Flexible Copper-coated Polymer Films

abstract

This work analyzes the processing of Pb(Zr,Ti)O-3 (PZT) thin films directly on copper-coated polymer films. PZT thin film deposition was performed onto the metallized Kapton films using a single RF plasma jet. In order to reduce the interaction of PZT and Cu during the initial growth stage, an ultrathin amorphous TiO2-x seeding layer was sputter-deposited prior to PZT deposition. The film texture was a mixture of (111)-oriented perovskite nanocrystals, rutile and pyrochlore. Topography and piezoelectric in-plane and out-of-plane response of the films were evaluated using a commercial AFM adapted for piezoforce measurements. The as-deposited films were self-polarized with polarization pointing at the surface of the sample. Polarization was switchable and a piezoelectric hysteresis was obtained.

keywords

PLASMA-JET SYSTEM; FORCE MICROSCOPY; DEPOSITION; STABILITY; GLASS

subject category

Materials Science

authors

Suchaneck, G; Volkonskiy, O; Gerlach, G; Hubicka, Z; Dejneka, A; Jastrabik, L; Kiselev, D; Bdikin, I; Kholkin, A

our authors

acknowledgements

This work was supported by the German Research Foundation (DFG), Grant GE 779/18, by the Academy of Science of the Czech Republic, Grant KJB100100703, Grants 202/09/J017 and AV0Z10100522, and by the DAAD-GRICES exchange program.

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