Vanadium Oxide Sensing Layer Grown on Carbon Nanotubes by a New Atomic Layer Deposition Process

abstract

A new atomic layer deposition (ALD) process was applied for the homogeneous coating of carbon nanotubes with vanadium oxide. It permits the coating of the inner and outer surface with a highly conformal film of controllable thickness and, hence, the production of high surface area hybrid materials at a so far unprecedented quality. The ALD-coated tubes are used as active component in gas-sensing devices. They show electric responses that are directly related to the peculiar structure, i.e., the p-n heterojunction formed between the support and the film.

keywords

METAL-OXIDE; GAS SENSORS; THIN-FILMS; NONAQUEOUS SYNTHESIS; OXYGEN; ADSORPTION; ROUTES; NANOPARTICLES; TEMPERATURE; BUNDLES

subject category

Chemistry; Science & Technology - Other Topics; Materials Science; Physics

authors

Willinger, MG; Neri, G; Rauwel, E; Bonavita, A; Micali, G; Pinna, N

our authors

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acknowledgements

We thank Dr. Dangsheng Su and Rosa Arrigo from the Fritz Haber Institute of the Max Planck Society, Berlin, Germany, for supplying carbon nanotubes. Financial support from FCT project (PTDC/CTM/65667/2006), FAME network of excellence, and Marie Curie (MEIF-CT2006-041632) is acknowledged. C

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