Tin Dioxide Sensing Layer Grown on Tubular Nanostructures by a Non-Aqueous Atomic Layer Deposition Process

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abstract

A new atomic layer deposition (ALD) process for nanocrystalline tin dioxide films is developed and applied for the coating of nanostructured materials. This approach, which is adapted from non-hydrolytic sol-gel chemistry, permits the deposition of SnO(2) at temperatures as low as 75 degrees C. It allows the coating of the inner and outer surface of multiwalled carbon nanotubes with a highly conformal film of controllable thickness. The ALD-coated tubes are investigated as active components in gas-sensor devices. Due to the formation of a p-n heterojunction between the highly conductive support and the SnO(2) thin film an enhancement of the gas sensing response is observed.

keywords

SNO2 THIN-FILMS; CARBON NANOTUBES; ROOM-TEMPERATURE; GAS SENSOR; AIR-POLLUTION; OXIDE; CO; EPITAXY; NANOSENSORS; SENSITIVITY

subject category

Chemistry; Science & Technology - Other Topics; Materials Science; Physics

authors

Marichy, C; Donato, N; Willinger, MG; Latino, M; Karpinsky, D; Yu, SH; Neri, G; Pinna, N

our authors

foto Dzmitry Karpinski (Karpinsky)

Dzmitry Karpinski (Karpinsky)

Post-doc Fellowship
foto Nicola Pinna

Nicola Pinna

Researcher

Groups

Projects

Nanotubes and Nanowires based hybrid nanostructures (PTDC/CTM/098361/2008)

Structural and chemical characterization at the nanometer scale (PTDC/CTM/100468/2008)

RMNE-UA-National Network of Electron Microscopy (REDE/1509/RME/2005 )

acknowledgements

Prof. David Cornu from the Institut Europeen des Membranes in Montpellier (France) is acknowledged for the BN nanotubes synthesis and Dr. Dmitry Kiselev from the University of Aveiro (Portugal) for AFM measurements. This work was partially supported by the WCU (World Class University) program through the National Research Foundation (NRF) of Korea funded by the Ministry of Education, Science and Technology (R31-10013) and FCT projects (PTDC/CTM/098361/2008), (PTDC/CTM/100468/2008), (REDE/1509/RME/2005), and (SFRH/BPD/42506/2007).

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Publication Details

type
Journal Article
year
2011
journal
ADVANCED FUNCTIONAL MATERIALS
volume
21
publisher
WILEY-V C H VERLAG GMBH
issn
1616-301X
issue
4
digital object identifier
10.1002/adfm.201001572
web of science article identifier
WOS:000287667800006

Journal Metrics (JCR 2019)

Journal Impact Factor
16.836
Journal Impact Factor (5 yrs)
15.722
category normalized journal percentile
95.322

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