Tin Dioxide Sensing Layer Grown on Tubular Nanostructures by a Non-Aqueous Atomic Layer Deposition Process

resumo

A new atomic layer deposition (ALD) process for nanocrystalline tin dioxide films is developed and applied for the coating of nanostructured materials. This approach, which is adapted from non-hydrolytic sol-gel chemistry, permits the deposition of SnO(2) at temperatures as low as 75 degrees C. It allows the coating of the inner and outer surface of multiwalled carbon nanotubes with a highly conformal film of controllable thickness. The ALD-coated tubes are investigated as active components in gas-sensor devices. Due to the formation of a p-n heterojunction between the highly conductive support and the SnO(2) thin film an enhancement of the gas sensing response is observed.

palavras-chave

SNO2 THIN-FILMS; CARBON NANOTUBES; ROOM-TEMPERATURE; GAS SENSOR; AIR-POLLUTION; OXIDE; CO; EPITAXY; NANOSENSORS; SENSITIVITY

categoria

Chemistry; Science & Technology - Other Topics; Materials Science; Physics

autores

Marichy, C; Donato, N; Willinger, MG; Latino, M; Karpinsky, D; Yu, SH; Neri, G; Pinna, N

nossos autores

Grupos

agradecimentos

Prof. David Cornu from the Institut Europeen des Membranes in Montpellier (France) is acknowledged for the BN nanotubes synthesis and Dr. Dmitry Kiselev from the University of Aveiro (Portugal) for AFM measurements. This work was partially supported by the WCU (World Class University) program through the National Research Foundation (NRF) of Korea funded by the Ministry of Education, Science and Technology (R31-10013) and FCT projects (PTDC/CTM/098361/2008), (PTDC/CTM/100468/2008), (REDE/1509/RME/2005), and (SFRH/BPD/42506/2007).

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