Femtosecond Infrared Laser Annealing of PZT Films on a Metal Substrate


The quazi-amorphous PbZrTiO2 (PZT) precursor film on a platinized silicon substrate is annealed by femtosecond laser at the wavelength falling into transparency band of PZT. Two areas are found within the laser spot: ferroelectric perovskite revealing strong hysteresis and coercivity in piezoelectric response and paraelectric with low piezoresponse and the absence of hysteresis and coercivity. Annealing takes place through platinum absorbing laser irradiation and acting as a heat source for transparent film on top of it.



subject category

Materials Science; Physics


Firsova, NY; Mishina, ED; Sigov, AS; Senkevich, SV; Pronin, IP; Kholkin, A; Bdikin, I; Yuzyuk, YI

our authors


Parts of this work were supported by the Russian Foundation for Basic Research, and the Ministry of Education and Science of Russian Federation (Center of Collective Users

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