Piezoelectric properties of self-polarized Pb(ZrxTi1-x)O-3 thin films probed by scanning force microscopy
authors Shvartsman, VV; Pankrashkin, AV; Afanasjev, VP; Kaptelov, EY; Pronin, IP; Kholkin, AL
nationality International
journal INTEGRATED FERROELECTRICS
keywords INTEGRATED FERROELECTRIC CAPACITORS; IMPRINT
abstract Self-polarization effect was observed in Pb(Zr0.54Ti0.46)O-3 (PZT) films with 10 mol% of PbO excess RF magnetron sputtered onto Pt/Ti/SiO2/Si substrates. On the contrary, no self-polarization was found in films sputtered from stoichiometric targets. Local piezoelectric measurements revealed the asymmetry in the piezoelectric distributions of self-polarized films that was significantly reduced after UV illumination. The tentative model was suggested that may explain the observed results.
publisher TAYLOR & FRANCIS LTD
issn 1058-4587
year published 2005
volume 69
beginning page 103
ending page 111
digital object identifier (doi) 10.1080/10584580590897344
web of science category Engineering, Electrical & Electronic; Physics, Applied; Physics, Condensed Matter
subject category Engineering; Physics
unique article identifier WOS:000226933000012
  ciceco authors
  impact metrics
journal analysis (jcr 2019):
journal impact factor 0.557
5 year journal impact factor 0.556
category normalized journal impact factor percentile 3.908
dimensions (citation analysis):
altmetrics (social interaction):



 


Sponsors

1suponsers_list_ciceco.jpg