Piezoelectric properties of self-polarized Pb(ZrxTi1-x)O-3 thin films probed by scanning force microscopy

abstract

Self-polarization effect was observed in Pb(Zr0.54Ti0.46)O-3 (PZT) films with 10 mol% of PbO excess RF magnetron sputtered onto Pt/Ti/SiO2/Si substrates. On the contrary, no self-polarization was found in films sputtered from stoichiometric targets. Local piezoelectric measurements revealed the asymmetry in the piezoelectric distributions of self-polarized films that was significantly reduced after UV illumination. The tentative model was suggested that may explain the observed results.

keywords

INTEGRATED FERROELECTRIC CAPACITORS; IMPRINT

subject category

Engineering; Physics

authors

Shvartsman, VV; Pankrashkin, AV; Afanasjev, VP; Kaptelov, EY; Pronin, IP; Kholkin, AL

our authors

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