Non-aqueous routes to metal oxide thin films by atomic layer deposition

keywords

HAFNIUM DIOXIDE FILMS; VAPOR-DEPOSITION; FORMATION MECHANISMS; ALKOXIDE PRECURSORS; GATE DIELECTRICS; WATER; NANOPARTICLES; CHEMISTRY; SURFACES; CLUSTERS

subject category

Chemistry

authors

Rauwel, E; Clavel, G; Willinger, MG; Rawel, P; Pinna, N

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