Molybdenum Oxide Thin Films Grown on Flexible ITO-Coated PET Substrates

authors	Marciel, A; Graca, M; Bastos, A; Pereira, L; Kumar, JS; Borges, J; Vaz, F; Peres, M; Magalhaes, S; Lorenz, K; Silva, R
nationality	International
journal	MATERIALS
author keywords	MoOx; flexible substrates; electrochromic; DC magnetron sputtering
abstract	Molybdenum oxide thin films were deposited on stiff and flexible substrates by reactive DC magnetron sputtering. Two sets of samples were prepared. The first with different O-2/Ar flow rate ratios and the second, fixing the oxygen content, with different time of deposition. As the O-2/Ar flow rate ratio varies from 0 up to 0.56, a threshold was found, ranging from crystalline to amorphous nature, and from a nontransparent appearance with metallic-like electrical conductivity to transparent and dielectric behaviour. From the second set, all transparent, the MoOx films present a compact/dense and featureless morphology with thickness from 190 up to 910 nm, depending on the time of deposition. Their structure was corroborated by XPS and Rutherford Backscattering Spectrometry (RBS) and density measurements were performed by RBS and X-ray reflectivity (XRR), revealing a value of 2.4 g/cm(3). The surface roughness is in the order of a few nanometers and the maxima optical transmission, in the visible range, is around 89%. Electrochemical cyclic voltammograms showed noticeable color reversibility and reproducibility on the flexible substrates opening new framework possibilities for new electrochomic devices.
publisher	MDPI
isbn	1996-1944
year published	2021
volume	14
issue	4
digital object identifier (doi)	10.3390/ma14040821
web of science category	20
subject category	Chemistry, Physical; Materials Science, Multidisciplinary; Metallurgy & Metallurgical Engineering; Physics, Applied; Physics, Condensed Matter
unique article identifier	WOS:000624104300001