Application of gel-casting to the fabrication of 1-3 piezoelectric ceramic-polymer composites for high-frequency ultrasound devices
authors Garcia-Gancedo, L; Olhero, SM; Alves, FJ; Ferreira, JMF; Demore, CEM; Cochran, S; Button, TW
nationality International
journal JOURNAL OF MICROMECHANICS AND MICROENGINEERING
keywords TRIANGULAR-PILLAR GEOMETRY; LEAD-ZIRCONATE-TITANATE; EPOXY-RESIN; TRANSDUCERS; ARRAYS; PERFORMANCE; PZT; MICROFABRICATION; ALUMINA
abstract A modified gel-casting technique was used to fabricate a 1-3 piezoelectric ceramic/polymer composite substrate formed by irregular-shaped pillar arrays of small dimensions and kerfs. This technique involves the polymerization of aqueous piezoelectric (PZT) suspensions with added water-soluble epoxy resin and polyamine-based hardener that lead to high strength, high density and resilient ceramic bodies. Soft micromoulding was used to shape the ceramic segments, and micropillars with lateral features down to 4 mu m and height-to-width aspect ratios of similar to 10 were achieved. The composite exhibited a clear thickness resonance mode at approximately 70 MHz and a k(eff) similar to 0.51, demonstrating that the ceramic micropillars possess good electrical properties. Furthermore, gel-casting allows the fabrication of ceramic structures with non-conventional shapes; hence, device design is not limited by the standard fabrication methods. This is of particular benefit for high-frequency transducers where the critical design dimensions are reduced.
publisher IOP PUBLISHING LTD
issn 0960-1317
year published 2012
volume 22
issue 12
digital object identifier (doi) 10.1088/0960-1317/22/12/125001
web of science category Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Instruments & Instrumentation; Physics, Applied
subject category Engineering; Science & Technology - Other Topics; Instruments & Instrumentation; Physics
unique article identifier WOS:000311790400001
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