Production of thick ceramic composite films via sol gel solutions sedimentation and infiltration

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Patent Details

Publication Number
PT102909
Priority Date
2003-02-13
Publication Date
2004-08-31
International Patent Classification
H01L41/39
H01L41/24
C04B35/46
C04B35/48
C04B35/491

Figures

figura
Microstructure of thick composite films of thick composite films with different thickness. Remanent polarization value with more than 30 μC/cm² for a 2.4 μm thick film.

Abstract

The present invention relates to a method for producing ceramic composite thick films of a thickness above 50 microns on a selected group of substrates at temperatures below 600 degrees Celsius, for piezoelectric applications.
Sol-gel solutions are mixed with up to about 90% by weight of powder particles (ceramic or single crystal) of a ferroelectric or ferroelectric relaxant material finely dispersed.
The resulting suspension is deposited onto substrates by centrifugation suffering subsequent thermal treatment to remove organic material and to develop a crystalline structure. Subsequently, the substrate covered with this layer of material is impregnated with the starting solution to infiltrate in vacuum the pores resulting from previous process. The process is cyclically repeated until the desired thickness is obtained. The resulting films are heat-treated to densify the composite.

Innovative aspects & main advantages

To provide an improved method for applying adherent composite ceramic films to a wide range of substrates in the thickness great than 1 micron and at least up to 50 micron without cracking. To provide an improved modified sol-gel process for producing polycrystalline ceramic composite coatings at low temperature as less than 600 ºC, for piezoelectric applications.

Applications

Sensors, actuators, electromechanical applications, MEMs.

Inventors

Vilarinho, Paula; Wu, Aiying; Kholkin, Andrei

Our Inventors

foto Aiying Wu

Aiying Wu

Researcher
foto Andrei Kholkin

Andrei Kholkin

Principal Researcher
foto Paula Maria Lousada Silveirinha Vilarinho

Paula Maria Lousada Silveirinha Vilarinho

Vice Director

Applicant

Universidade de Aveiro

Groups Involved

G2 - Photonic, Electronic and Magnetic Materials

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