Production of thick ceramic composite films via sol gel solutions sedimentation and infiltration


The present invention relates to a method for producing ceramic composite thick films of a thickness above 50 microns on a selected group of substrates at temperatures below 600 degrees Celsius, for piezoelectric applications.
Sol-gel solutions are mixed with up to about 90% by weight of powder particles (ceramic or single crystal) of a ferroelectric or ferroelectric relaxant material finely dispersed.
The resulting suspension is deposited onto substrates by centrifugation suffering subsequent thermal treatment to remove organic material and to develop a crystalline structure. Subsequently, the substrate covered with this layer of material is impregnated with the starting solution to infiltrate in vacuum the pores resulting from previous process. The process is cyclically repeated until the desired thickness is obtained. The resulting films are heat-treated to densify the composite.

Innovative aspects & main advantages

To provide an improved method for applying adherent composite ceramic films to a wide range of substrates in the thickness great than 1 micron and at least up to 50 micron without cracking. To provide an improved modified sol-gel process for producing polycrystalline ceramic composite coatings at low temperature as less than 600 ºC, for piezoelectric applications.


Sensors, actuators, electromechanical applications, MEMs.


Vilarinho, Paula; Wu, Aiying; Kholkin, Andrei

Our Inventors


Universidade de Aveiro
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